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課程名稱 |
先進半導體與顯示技術
Advanced Technologies for Semiconductor and Display |
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開課學期 |
111-1 |
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授課對象 |
電機資訊學院 電子工程學研究所 |
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授課教師 |
劉致為 |
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課號 |
EEE5051 |
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課程識別碼 |
943 U0530 |
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班次 |
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學分 |
3.0 |
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全/半年 |
半年 |
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必/選修 |
選修 |
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上課時間 |
星期二7,8,9(14:20~17:20) |
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上課地點 |
明達231 |
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備註 |
總人數上限：150人 |
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課程簡介影片 |
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核心能力關聯 |
核心能力與課程規劃關聯圖 |
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課程大綱
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為確保您我的權利,請尊重智慧財產權及不得非法影印
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課程概述 |
• A total of 167 students ( 9 Doctors, 151 Masters and 7 Bachelors) from 14 Departments had
enrolled in FY20 1st Semester (last year).
• Instructors will introduce front-end, middle end, and back-end processes of logic and memory
semiconductor (including Packaging), PVD and CVD processes of Liquid Crystal Display (LCD),
Encapsulation process of advanced OLED and Micro-LED.
• All the instructors are either with Ph.D. Degrees (Technical Director) or with higher than 20 year
work experience (Sr. Product Manager, Product Director or Sr. Product Director) in the
Semiconductor or Display industries.
• In addition, Erix Yu, Group VP of AMAT, President of AMT, will give a talk . |
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課程目標 |
透過台灣應用材料業師的指導，學習半導體領域知識。
AMT will give the Certificate who completes the course. |
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課程要求 |
本門課程歡迎半導體相關領域的大三、大四、碩博士班學生前來修習!
本課程開放加簽，請同學第一堂課到教室領取授權碼即可，我們會盡最大能量讓同學都可以修課!
請記得在 NTU COOL 上個人資料登記英文名字
期末採分組海報展覽，將視情況決定線上與否
上課之規定將依學校公告之疫情規定調整，請同學留意信件及NTU COOL公告。
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預期每週課後學習時數 |
待補 |
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Office Hours |
另約時間 |
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指定閱讀 |
待補 |
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參考書目 |
Materials:
• The materials will be sent 1 week before class. Moreover, the related Videos will be shown in
the class.
Semi Lab Touring:
• AMAT Global Technology Learning Center (GTLC) – the World-Wide Biggest 300mm Semiconductor Equipment ( |
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評量方式
(僅供參考) |
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No. |
項目 |
百分比 |
說明 |
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1. |
Mid-term Exam |
40% |
實體考試 |
2. |
Final Poster Exhibition |
60% |
• Final Poster Exhibition (60%):
– The students will be divided into 36 groups (4-5 persons/each group).
– There will be 12 topics (Display PVD&CVD, Advanced OLED and Micro LED, Process flow of Foundry, Process Flow of DRAM, FEP, MDP, Implant, Etch, DDP, CMP, PDC and Packaging).
That means 1 topic will be chosen by 3 Groups and will be decided (volunteers are welcomed) on mid-exam. |
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週次 |
日期 |
單元主題 |
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第1週 |
9/6 |
1.Opening
2.Make a better future
3.Introduction to Course 課程簡介
4.Introduction to Applied Materials 美商應用材料簡介 |
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第2週 |
9/13 |
應材 - 半導體與顯示器產品概述
(Applied Materials Product Overview – Semiconductor and Display) |
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第3週 |
9/20 |
顯示器物理氣、化學相沉積及物理沉積技術及產品
(Physical & Chemical Vapor Deposition Product for Display) |
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第4週 |
9/27 |
Introduction to Flat Panel Display (FPD) - Advanced OLED and Micro LED |
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第5週 |
10/4 |
Process flow of Semiconductor: DRAM |
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第6週 |
10/11 |
前段製程及鰭式電晶體簡介
(Front-end (including FinFET Transistor) Product for Semiconductor) |
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第7週 |
10/18 |
離子植入製程技術與產品 (Implant Product for Semiconductor) |
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第8週 |
10/25 |
蝕刻製程技術及產品 (Etch Products for Semiconductor) |
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第9週 |
11/1 |
金屬化製程簡介 (MDP Products for Semiconductor) |
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第10週 |
11/8 |
平坦化 - 化學機械研磨 (Planarization of Semiconductor: Chemical Mechanical Polishing) |
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第11週 |
11/15 |
Mid-term Exam |
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第12週 |
11/22 |
封裝製程及設備 (Packaging Product for Semiconductor) |
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第13週 |
11/29 |
微影製程 - 光學顯影技術 (Lithography) |
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第14週 |
12/6 |
Process flow of Semiconductor: Foundry |
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第15週 |
12/13 |
Applied Materials Global Technology Learning Center (GTLC) Lab Touring
製程診斷與控制技術及產品 (Process Diagnostics & Control) |
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第16週 |
12/20 |
Final Exam – Poster Exhibition |
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